Gaertner ellipsometer lse manual






















The LS Stokes WAFERSKAN Ellipsometer's high speed film thickness mapping system measures 49 sites in 49 seconds! It is a fast instrument for thin film visualization giving tilt-free, focus-free, automatic 2D/3D color thickness and index images of the sample. The model LS maps up to mm wafers. The LS with a manual hand. The LSE Ellipsometer is designed for use in either a production or laboratory facility under environmentally controlled conditions providing relatively constant room ambient temperature at 20° C (68° F) and a dry, dust-free atmosphere. The ellipsometer requires a . You must be a qualified user on the Gaertner LS Stokes Ellipsometer. The System can read from eight preset incidence angles of 30, 45, 50, 55, 60, 65, 70, 75 and Missing: lse.


The LS Stokes WAFERSKAN Ellipsometer's high speed film thickness mapping system measures 49 sites in 49 seconds! It is a fast instrument for thin film visualization giving tilt-free, focus-free, automatic 2D/3D color thickness and index images of the sample. The model LS maps up to mm wafers. The LS with a manual hand. Gaertner Modeling program works very closely to this as well. 2nd mode of operation is the 2Angle mode which is very similar as well. 1. Turn the “Power on/off Keyswitch” until the “Power” light on the front illuminates. 2. Start the “GEMP” (Gartner Ellipsometer Measurement Program) program on the computer. 3. gaertner ellipsometer measurement program LGEMP description The LGEMP Windows software is versatile and can measure single layer films such as oxides, nitrides and photoresists as well the top layer on a known 1, 2, or 3 layer stack such as poly on oxide and oxide on poly on oxide.


Stokes Microspot Laser Ellipsometer LSE-MS. offers a 15 micron measuring laser beam diameter, manual 2x2 inch micrometer positioning stage and a CCD camera. The GAERTHNER Scientific Corporation L is a single wavelength, variable angle, manual, null ellipsometer using nm line of a He:Ne laser for. LSE STOKES ELLIPSOMETER USER MANUAL CB GAERTNER SCIENTIFIC CORPORATION W. Jarvis Ave., Skokie, IL USA TEL: ; FAX: OPTIONAL SCATTER.

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